{"id":65,"date":"2013-06-18T12:10:38","date_gmt":"2013-06-18T10:10:38","guid":{"rendered":"http:\/\/wihmo.de\/nanotech\/?page_id=65"},"modified":"2015-04-15T11:47:09","modified_gmt":"2015-04-15T09:47:09","slug":"ausstatung2","status":"publish","type":"page","link":"https:\/\/nanotech-nrw.de\/?page_id=65","title":{"rendered":"Ausstatung"},"content":{"rendered":"<p><a href=\"https:\/\/nanotech-nrw.de\/wp-content\/uploads\/2013\/06\/IMS_Reinraum_2012_177sm.jpg\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-287\" alt=\"IMS_Reinraum_2012_177sm\" src=\"https:\/\/nanotech-nrw.de\/wp-content\/uploads\/2013\/06\/IMS_Reinraum_2012_177sm.jpg\" width=\"640\" height=\"384\" \/><\/a><\/p>\n<p><b>Fertigungsprozesse (Reinraum)<\/b><\/p>\n<ul>\n<li>Dreistock\u00f6fen, Bedampfungsanlagen, Sputtern, Fotolithographie, LPCVD, PECVD, RTP, Ionenimplantation, Plasma-\u00c4tzen, RIE, Thermopolitur, Vakuum-Temperofen, Restgasanalyse (1800\u00b0C)<\/li>\n<\/ul>\n<p><b>Elektrische Charakterisierung<\/b><\/p>\n<ul>\n<li>HP-Admittanzbr\u00fccke, DLTS, HF\/LF, C-V, C-V-quasi-statisch, 4\/2-Spitzenme\u00dfplatz, Parameter-Analyzer HP4156<\/li>\n<\/ul>\n<p><b>Optische Charakterisierung<\/b><\/p>\n<ul>\n<li>Solarsimulator, spektrale Empfindlichkeit, LBIC, CPM, SPV, Transmission, Reflexion, Ulbricht-Kugel<\/li>\n<li>Elipsometrie<\/li>\n<li>Raman-Spektrometer<\/li>\n<\/ul>\n<p><b>Thermische Charakteresierung<\/b><\/p>\n<ul>\n<li>Me\u00dfplatz zur thermischen Leitf\u00e4higkeit<\/li>\n<\/ul>\n<p><b>Mikroskopie<\/b><\/p>\n<ul>\n<li>Lichtmikroskope, REM<\/li>\n<\/ul>\n<p><b>Molekularstrahl-Epitaxie<\/b><\/p>\n<ul>\n<li>RIBER Epineat MBE-System<\/li>\n<\/ul>\n<p><b>Fokussierte-Ionenstrahlger\u00e4te<\/b><\/p>\n<ul>\n<li>4 Implantationssysteme von JEOL, EIKO und Orsay Physics<\/li>\n<\/ul>\n<p><b>Schnelle Thermische Ausheil\u00f6fen<\/b><\/p>\n<ul>\n<li>2 steag-AST Ausheilsysteme<\/li>\n<\/ul>\n<p><b>Fotolitografie<\/b><\/p>\n<ul>\n<li>Quintel Q 4001<\/li>\n<li>S\u00fcss MJB-3 Mask Aligner<\/li>\n<li>S\u00fcss M A 4<\/li>\n<\/ul>\n<p><b>Photolumineszenz-Me\u00dfplatz<\/b><\/p>\n<ul>\n<li><span style=\"text-decoration: underline;\">Anregungsquellen<\/span> : Laser LED rot, 638 nm \/ HeCd Laser UV, 325 nm<\/li>\n<li><span style=\"text-decoration: underline;\">Monochromator<\/span> : Spex 500M<\/li>\n<li><span style=\"text-decoration: underline;\">Detektoren<\/span> : Si-Photodiode, InGaAs-Photodiode, stickstoffgek\u00fchlt.<\/li>\n<\/ul>\n<p><b>Transportmessungen<\/b><\/p>\n<ul>\n<li>Klassischer Halleffekt (bei T=1.0 &#8211; 300K).<\/li>\n<li>Supraleitende Magneten bis zu 16 T.<\/li>\n<li>Diverse Strom\/Spannungsme\u00dfpl\u00e4tze.<\/li>\n<\/ul>\n<p><b>Degradation<\/b><\/p>\n<ul>\n<li>Thermo-Messplatz<\/li>\n<li>Klimakammer<\/li>\n<\/ul>\n","protected":false},"excerpt":{"rendered":"<p>Fertigungsprozesse (Reinraum) Dreistock\u00f6fen, Bedampfungsanlagen, Sputtern, Fotolithographie, LPCVD, PECVD, RTP, Ionenimplantation, Plasma-\u00c4tzen, RIE, Thermopolitur, Vakuum-Temperofen, Restgasanalyse (1800\u00b0C) Elektrische Charakterisierung HP-Admittanzbr\u00fccke, DLTS, HF\/LF, C-V, C-V-quasi-statisch, 4\/2-Spitzenme\u00dfplatz, Parameter-Analyzer HP4156 Optische Charakterisierung Solarsimulator, spektrale Empfindlichkeit, LBIC, CPM, SPV, Transmission, Reflexion, Ulbricht-Kugel Elipsometrie Raman-Spektrometer Thermische &hellip; <a href=\"https:\/\/nanotech-nrw.de\/?page_id=65\">Weiterlesen <span class=\"meta-nav\">&rarr;<\/span><\/a><\/p>\n","protected":false},"author":3,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-65","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/nanotech-nrw.de\/index.php?rest_route=\/wp\/v2\/pages\/65","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/nanotech-nrw.de\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/nanotech-nrw.de\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/nanotech-nrw.de\/index.php?rest_route=\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/nanotech-nrw.de\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=65"}],"version-history":[{"count":12,"href":"https:\/\/nanotech-nrw.de\/index.php?rest_route=\/wp\/v2\/pages\/65\/revisions"}],"predecessor-version":[{"id":289,"href":"https:\/\/nanotech-nrw.de\/index.php?rest_route=\/wp\/v2\/pages\/65\/revisions\/289"}],"wp:attachment":[{"href":"https:\/\/nanotech-nrw.de\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=65"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}